Fatigue damage in thin film Al interconnects at ultra high frequency: A finite element analysis approach

Metadata only

Author

Date

2007

Type

Conference Paper

ETH Bibliography

yes

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Publication status

published

External links

Journal / series

Thin Solid Films

Volume

515(6)

Pages / Article No.

3291 - 3297

Publisher

Elsevier

Event

Mechanical Behaviour of Thin Films and Small Structures (TMS 2005), San Francisco, CA, USA, February 13-17, 2005

Subject

Fatigue; Electronic devices; Metallization; Structural properties

Organisational unit

03692 - Spolenak, Ralph / Spolenak, Ralph

Notes

Available online 24 February 2006.

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ETH Bibliography

yes

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Research Collection