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dc.contributor.author
Eberl, Christoph
dc.contributor.author
Spolenak, Ralph
dc.contributor.author
Kraft, Oliver
dc.contributor.author
Ruile, Werner
dc.contributor.author
Arzt, Eduard
dc.date.accessioned
2017-06-08T17:16:17Z
dc.date.available
2017-06-08T17:16:17Z
dc.date.issued
2007
dc.identifier.issn
0040-6090
dc.identifier.issn
1879-2731
dc.identifier.other
10.1016/j.tsf.2006.01.042
dc.identifier.uri
http://hdl.handle.net/20.500.11850/6110
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Fatigue
dc.subject
Electronic devices
dc.subject
Metallization
dc.subject
Structural properties
dc.title
Fatigue damage in thin film Al interconnects at ultra high frequency
dc.type
Conference Paper
ethz.title.subtitle
A finite element analysis approach
ethz.journal.title
Thin Solid Films
ethz.journal.volume
515
ethz.journal.issue
6
ethz.journal.abbreviated
Thin Solid Films
ethz.pages.start
3291
ethz.pages.end
3297
ethz.event
Mechanical Behaviour of Thin Films and Small Structures (TMS 2005)
ethz.event.location
San Francisco, CA, USA
ethz.event.date
February 13-17, 2005
ethz.notes
Available online 24 February 2006.
ethz.identifier.nebis
000056364
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02160 - Dep. Materialwissenschaft / Dep. of Materials::02645 - Institut für Metallforschung / Institute of Metals Research::03692 - Spolenak, Ralph / Spolenak, Ralph
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02160 - Dep. Materialwissenschaft / Dep. of Materials::02645 - Institut für Metallforschung / Institute of Metals Research::03692 - Spolenak, Ralph / Spolenak, Ralph
ethz.date.deposited
2017-06-08T17:16:42Z
ethz.source
ECIT
ethz.identifier.importid
imp59364b9b06d3b35887
ethz.ecitpid
pub:16483
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T20:19:44Z
ethz.rosetta.lastUpdated
2018-10-01T04:42:42Z
ethz.rosetta.exportRequired
true
ethz.rosetta.versionExported
true
ethz.COinS
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