Backside liquid Phase Photolitography for Fabricating self-organizing hydrogel bilayers
- Conference Paper
Rights / licenseCreative Commons Attribution-NonCommercial-NoDerivs 3.0 Unported
We propose a backside exposure liquid phase photolithography platform for the fabrication of polymer microsystems. While conventional process strategies require a solidified polymer film prior to exposure, we utilize polymer encapsulation in order to directly cross-link the polymer from solution. Silane-based surface passivation and lift-off resist are used to control polymer adhesion after removal of the encapsulation. This process platform offers many attractive features including self-aligned processing of multilayer arrangements and controlled release capabilities. The fabrication of a drug delivery vehicle made from self-organizing hydrogel bilayers is a target application of this research. Show more
Book title26th European Conference on Solid-State Transducers, EUROSENSOR 2012
Journal / seriesProcedia Engineering
Pages / Article No.
SubjectHydrogel; Lithography; Backside Exposure; Self-Organizing Bilayers
Organisational unit03609 - Hierold, Christofer / Hierold, Christofer
03627 - Nelson, Bradley J. / Nelson, Bradley J.
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