Development of ultra-small thin film diaphragms for pressure sensor applications

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Author
Süss, T.
Hierold, C.
Date
2012
Type
  • Other Conference Item
Publication status
published
External links
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Journal / series
23rd Micromechanics and Microsystems Europe Workshop (MME 2012)
Event
23rd Micromechanics and Microsystems Europe Workshop (MME 2012), Ilmenau, Germany, September 9-12, 2012
Subject
Atomic layer deposition; Diaphragm; Thin film; Pressure Sensro
Organisational unit
03609 - Hierold, Christofer
Notes
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