Development of ultra-small thin film diaphragms for pressure sensor applications
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Date
2012Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedBook title
23rd Micromechanics and Microsystems Europe Workshop (MME 2012)Pages / Article No.
Publisher
University of Technology IlmenauEvent
Subject
Atomic layer deposition; Diaphragm; Thin film; Pressure SensroOrganisational unit
03609 - Hierold, Christofer / Hierold, Christofer
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ETH Bibliography
yes
Altmetrics