Development of ultra-small thin film diaphragms for pressure sensor applications

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Author
Süss, Tobias
Hierold, Christofer
Date
2012
Type
    Conference Paper
Publication status
published
Book title
23rd Micromechanics and Microsystems Europe Workshop (MME 2012)
Pages / Article No.
A11
Publisher
University of Technology Ilmenau
Event
23rd Micromechanics and Microsystems Europe Workshop (MME 2012), Ilmenau, Germany, September 9-12, 2012
Subject
Atomic layer deposition; Diaphragm; Thin film; Pressure Sensro
Organisational unit
03609 - Hierold, Christofer / Hierold, Christofer  
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