Development of ultra-small thin film diaphragms for pressure sensor applications

Thumbnail
Metadata only
Author
Süss, T.
Hierold, C.
Date
2012
Type
  • Other Conference Item
Publication status
published
External links
Search via SFX
Journal / series
23rd Micromechanics and Microsystems Europe Workshop (MME 2012)
Event
23rd Micromechanics and Microsystems Europe Workshop (MME 2012), Ilmenau, Germany, September 9-12, 2012
Subject
Atomic layer deposition; Diaphragm; Thin film; Pressure Sensro
Organisational unit
03609 - Hierold, Christofer / Hierold, Christofer  
Notes
.
More
Show all metadata
ETH Bibliography
yes
Altmetrics