Development of ultra-small thin film diaphragms for pressure sensor applications

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Autor(in)
Süss, T.
Hierold, C.
Datum
2012
Typ
  • Other Conference Item
Publikationsstatus
published
Externe Links
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Zeitschrift / Serie
23rd Micromechanics and Microsystems Europe Workshop (MME 2012)
Konferenz
23rd Micromechanics and Microsystems Europe Workshop (MME 2012), Ilmenau, Germany, September 9-12, 2012
Thema
Atomic layer deposition; Diaphragm; Thin film; Pressure Sensro
Organisationseinheit
03609 - Hierold, Christofer / Hierold, Christofer  
Anmerkungen
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