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dc.contributor.author
Süss, T.
dc.contributor.author
Hierold, C.
dc.date.accessioned
2017-06-10T13:16:22Z
dc.date.available
2017-06-10T13:16:22Z
dc.date.issued
2012
dc.identifier.uri
http://hdl.handle.net/20.500.11850/62585
dc.language.iso
en
dc.subject
Atomic layer deposition
dc.subject
Diaphragm
dc.subject
Thin film
dc.subject
Pressure Sensro
dc.title
Development of ultra-small thin film diaphragms for pressure sensor applications
dc.type
Other Conference Item
ethz.journal.title
23rd Micromechanics and Microsystems Europe Workshop (MME 2012)
ethz.event
23rd Micromechanics and Microsystems Europe Workshop (MME 2012)
ethz.event.location
Ilmenau, Germany
ethz.event.date
September 9-12, 2012
ethz.notes
.
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
ethz.date.deposited
2017-06-10T13:17:11Z
ethz.source
ECIT
ethz.identifier.importid
imp59365047767e438024
ethz.ecitpid
pub:99329
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-24T09:16:21Z
ethz.rosetta.lastUpdated
2018-11-02T08:28:28Z
ethz.rosetta.versionExported
true
ethz.COinS
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