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dc.contributor.author
Süss, Tobias
dc.contributor.author
Hierold, Christofer
dc.date.accessioned
2021-03-05T13:26:57Z
dc.date.available
2017-06-10T13:16:22Z
dc.date.available
2021-03-05T13:26:57Z
dc.date.issued
2012
dc.identifier.isbn
978-3-938843-71-0
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/62585
dc.language.iso
en
en_US
dc.publisher
University of Technology Ilmenau
en_US
dc.subject
Atomic layer deposition
en_US
dc.subject
Diaphragm
en_US
dc.subject
Thin film
en_US
dc.subject
Pressure Sensro
en_US
dc.title
Development of ultra-small thin film diaphragms for pressure sensor applications
en_US
dc.type
Conference Paper
ethz.book.title
23rd Micromechanics and Microsystems Europe Workshop (MME 2012)
en_US
ethz.pages.start
A11
en_US
ethz.size
4 p.
en_US
ethz.event
23rd Micromechanics and Microsystems Europe Workshop (MME 2012)
en_US
ethz.event.location
Ilmenau, Germany
en_US
ethz.event.date
September 9-12, 2012
en_US
ethz.publication.place
Ilmenau
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
en_US
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
ethz.relation.isPartOf
https://www.tu-ilmenau.de/de/mme2012/proceedings/
ethz.date.deposited
2017-06-10T13:17:11Z
ethz.source
ECIT
ethz.identifier.importid
imp59365047767e438024
ethz.ecitpid
pub:99329
ethz.eth
yes
en_US
ethz.availability
Metadata only
en_US
ethz.rosetta.installDate
2017-07-24T09:16:21Z
ethz.rosetta.lastUpdated
2022-03-29T05:38:45Z
ethz.rosetta.versionExported
true
ethz.COinS
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