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dc.contributor.author
Kopitkovas, G.
dc.contributor.author
Lippert, Thomas
dc.contributor.author
Venturini, J.
dc.contributor.author
David, C.
dc.contributor.author
Wokaun, Alexander
dc.date.accessioned
2017-06-08T17:26:31Z
dc.date.available
2017-06-08T17:26:31Z
dc.date.issued
2007
dc.identifier.issn
1742-6588
dc.identifier.issn
1742-6596
dc.identifier.other
10.1088/1742-6596/59/1/113
dc.identifier.uri
http://hdl.handle.net/20.500.11850/6540
dc.language.iso
en
dc.publisher
Institute of Physics
dc.title
Laser induced backside wet etching
dc.type
Conference Paper
ethz.title.subtitle
Mechanisms and fabrication of micro-optical elements
ethz.journal.title
Journal of Physics: Conference Series
ethz.journal.volume
59
ethz.journal.abbreviated
J. Phys.: Conf. Ser.
ethz.pages.start
526
ethz.pages.end
532
ethz.event
8th International Conference on Laser Ablation (COLA 2005)
ethz.event.location
Banff, Canada
ethz.event.date
September 11-16, 2005
ethz.notes
.
ethz.identifier.nebis
004903140
ethz.publication.place
Bristol
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02020 - Dep. Chemie und Angewandte Biowiss. / Dep. of Chemistry and Applied Biosc.::02513 - Laboratorium für Anorganische Chemie / Laboratory of Inorganic Chemistry
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02020 - Dep. Chemie und Angewandte Biowiss. / Dep. of Chemistry and Applied Biosc.::02516 - Inst. f. Chemie- und Bioingenieurwiss. / Inst. Chemical and Bioengineering::03421 - Wokaun, Alexander (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02020 - Dep. Chemie und Angewandte Biowiss. / Dep. of Chemistry and Applied Biosc.::02516 - Inst. f. Chemie- und Bioingenieurwiss. / Inst. Chemical and Bioengineering::03421 - Wokaun, Alexander (emeritus)
ethz.date.deposited
2017-06-08T17:26:43Z
ethz.source
ECIT
ethz.identifier.importid
imp59364ba34173834973
ethz.ecitpid
pub:16970
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-14T12:26:17Z
ethz.rosetta.lastUpdated
2018-12-02T04:26:23Z
ethz.rosetta.exportRequired
true
ethz.rosetta.versionExported
true
ethz.COinS
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