Self-alignment techniques for fabricating a-Si TFTs at 300 oC on clear plastic

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Author
Cherenack, Kunigunde H.
Hekmatshoar, Bahman
Wagner, Sigurd
Sturm, James C.
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Date
2009-03
Type
  • Conference Paper
Publication status
published
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Journal / series
Proceedings of the 5th International Thin Film Transistor (TFT) Conference
Pages / Article No.
9.5
Publisher
Ecole Polytechnique
Event
5th International Thin Film Transistor (TFT) Conference, Palaiseau, France, March 5-6, 2009
Organisational unit
03388 - Tröster, Gerhard (emeritus)  
Notes
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