Self-alignment techniques for fabricating a-Si TFTs at 300 oC on clear plastic

Metadata only

Author

Cherenack, Kunigunde H.

Hekmatshoar, Bahman

Wagner, Sigurd

Sturm, James C.

Date

2009-03

Type

ETH Bibliography

yes

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Publication status

published

External links

Journal / series

Proceedings of the 5th International Thin Film Transistor (TFT) Conference

Pages / Article No.

9.5

Publisher

Ecole Polytechnique

Event

5th International Thin Film Transistor (TFT) Conference, Palaiseau, France, March 5-6, 2009

Organisational unit

03388 - Tröster, Gerhard

Notes

.

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ETH Bibliography

yes

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Research Collection