Self-alignment techniques for fabricating a-Si TFTs at 300 oC on clear plastic

Metadata only

Autor(in)

Datum

2009-03

Typ

Conference Paper

ETH Bibliographie

yes

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Publikationsstatus

published

Zeitschrift / Serie

Proceedings of the 5th International Thin Film Transistor (TFT) Conference

Seiten / Artikelnummer

9.5

Verlag

Ecole Polytechnique

Konferenz

5th International Thin Film Transistor (TFT) Conference, Palaiseau, France, March 5-6, 2009

Organisationseinheit

03388 - Tröster, Gerhard (emeritus)

Mehr

ETH Bibliographie

yes

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Research Collection