Effects of target bias voltage on indium tin oxide films deposited by high target utilisation sputtering

Metadata only

Author

Date

2007

Type

Conference Paper

ETH Bibliography

yes

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Publication status

published

External links

Journal / series

Thin Solid Films

Volume

515(24)

Pages / Article No.

8500 - 8504

Publisher

Elsevier

Event

First International Symposium on Transparent Conducting Oxides, October 23-25, 2006

Subject

Indium tin oxide; Polyimide; Target bias; Sputtering; Thin films

Organisational unit

02498 - Ott H. R., Dünnschichtphysik

Notes

Available online 1 April 2007.

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ETH Bibliography

yes

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