Mid-Infrared Tunable Resonant Cavity Enhanced Detectors Employing Vertically Moving Comb Drive Actuated MEMS Micromirrors

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Author
Quack, Niels
Rust, Philipp
Blunier, Stefan
Dual, Jurg
Felder, Ferdinand
Arnold, Martin
Rahim, Mohamed
Fill, Matthias
Zogg, Hans
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Date
2008
Type
  • Other Conference Item
Publication status
published
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Book title
2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics
Pages
174 - 175
Publisher
IEEE
Event
IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Freiburg, Germany, August 11-14, 2008
Subject
Tunable RCED; Infrared detector; MEMS micromirror
Notes
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Citations
Cited 1 times in Web of Science
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