Mid-Infrared Tunable Resonant Cavity Enhanced Detectors Employing Vertically Moving Comb Drive Actuated MEMS Micromirrors

Thumbnail
Metadata only
Author
Quack, Niels
Rust, Philipp
Blunier, Stefan
Dual, Jürgcc
Felder, Ferdinand
Arnold, Martin
Rahim, Mohamed
Fill, Matthias
Zogg, Hans
Show all
Date
2008
Type
    Other Conference Item
Publication status
published
External links
Book title
2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics
Pages / Article No.
174 - 175
Publisher
IEEE
Event
IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Freiburg, Germany, August 11-14, 2008
Subject
Tunable RCED; Infrared detector; MEMS micromirror
More
Show all metadata
ETH Bibliography
yes
Altmetrics