Mid-Infrared Tunable Resonant Cavity Enhanced Detectors Employing Vertically Moving Comb Drive Actuated MEMS Micromirrors
Publication status
publishedExternal links
Book title
2008 IEEE/LEOS International Conference on Optical MEMS and NanophotonicsPages / Article No.
Publisher
IEEEEvent
Subject
Tunable RCED; Infrared detector; MEMS micromirrorMore
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ETH Bibliography
yes
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