Nanopatterning with extreme ultraviolet interference lithography for nanoelectronics and biotechnology

Metadata only

Author

Städler, Brigitte

Solak, Harun

Frerker, Susanne

Grandin, Michelle

Vörös, Janos

Date

2007

Type

Conference Paper

ETH Bibliography

yes

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Publication status

published

External links

Book title

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Pages / Article No.

406 - 410

Publisher

IEEE

Event

IEEE International Conference of Nano/Micro Engineered and Molecular Systems, Bangkok, Thailand, January 16-19, 2007

Notes

.

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ETH Bibliography

yes

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Research Collection