Nanopatterning with extreme ultraviolet interference lithography for nanoelectronics and biotechnology
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Date
2007Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedExternal links
Book title
Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular SystemsPages / Article No.
Publisher
IEEEEvent
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ETH Bibliography
yes
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