Nanopatterning with extreme ultraviolet interference lithography for nanoelectronics and biotechnology

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Author
Städler, Brigitte
Solak, Harun
Frerker, Susanne
Grandin, Michelle
Vörös, Janos
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Date
2007
Type
  • Conference Paper
Publication status
published
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Book title
Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Pages / Article No.
406 - 410
Publisher
IEEE
Event
IEEE International Conference of Nano/Micro Engineered and Molecular Systems, Bangkok, Thailand, January 16-19, 2007
Notes
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