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dc.contributor.author
Städler, Brigitte
dc.contributor.author
Solak, Harun
dc.contributor.author
Frerker, Susanne
dc.contributor.author
Grandin, Michelle, H.
dc.contributor.author
Vörös, Janos
dc.date.accessioned
2017-06-10T16:59:14Z
dc.date.available
2017-06-10T16:59:14Z
dc.date.issued
2007
dc.identifier.isbn
978-1-4244-0609-8
dc.identifier.isbn
1-4244-0610-2
dc.identifier.other
10.1109/NEMS.2007.352046
dc.identifier.uri
http://hdl.handle.net/20.500.11850/66829
dc.language.iso
en
dc.publisher
IEEE
dc.title
Nanopatterning with extreme ultraviolet interference lithography for nanoelectronics and biotechnology
dc.type
Conference Paper
ethz.book.title
Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems
ethz.pages.start
406
ethz.pages.end
410
ethz.event
IEEE International Conference of Nano/Micro Engineered and Molecular Systems
ethz.event.location
Bangkok, Thailand
ethz.event.date
January 16-19, 2007
ethz.identifier.wos
ethz.publication.status
published
ethz.date.deposited
2017-06-10T17:03:10Z
ethz.source
ECIT
ethz.identifier.importid
imp59365098d763292177
ethz.ecitpid
pub:106480
ethz.eth
yes
ethz.availability
Metadata only
dc.relation.isnodouble
6739
*
ethz.rosetta.installDate
2017-07-12T10:41:46Z
ethz.rosetta.lastUpdated
2022-03-28T11:43:05Z
ethz.rosetta.versionExported
true
ethz.COinS
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