Electron Beam Lithography for Nanoelectronics and Nanoparticle Assembly Applications

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Author
Rey, Antje
Lörtscher, Emanuel
Kuemin, Cyrill
Jain, Titoo
Wolf, Heiko
Bjørnholm, Thomas
Stemmer, Andreas
Riel, Heike
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Date
2011
Type
    Other Conference Item
Publication status
published
Publisher
FIRST-Lab; Raith GmbH
Event
Electron Beam Lithography Workshop, Zürich, Switzerland, November 15, 2011
Organisational unit
03444 - Stemmer, Andreas / Stemmer, Andreas  
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yes
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