Computational Fluid Dynamics-Based Optimisation of High-Speed and High-Performance Bearingless Cross-Flow Fan Designs

Abstract

To enhance the fluid dynamic performance of bearingless cross-flow fans (CFFs), this paper presents a CFD-based optimisation of both rotor and static casing wall modifications. High-performance CFFs are essential in industrial applications such as highly specialised laser modules in the semiconductor industry. The goal for the investigated rotor modifications is to enhance the CFF’s mechanical stiffness by integrating reinforcing shafts, which is expected to increase the limiting bending resonance frequency, thereby permitting higher rotational speeds. Additionally, the effects of these rotor modifications on the fluid dynamic performance are evaluated. For the casing wall modifications, the goal is to optimise design parameters to reduce losses. Optimised bearingless CFFs benefit semiconductor manufacturing by improving the gas circulation system within the laser module. Higher CFF performance is a key enabler for enhancing laser performance, increasing the scanning speed of lithography machines, and ultimately improving chip throughput. Several numerical simulations are conducted and validated using various commissioned prototypes, each measuring (Formula presented.) in length and (Formula presented.) in outer diameter. The results reveal that integrating a central shaft increases the rotational speed by up to 42%, from (Formula presented.) to (Formula presented.), due to enhanced CFF stiffness. However, the loss in fluid flow amounts to 61% and outweighs the gain in rotational speed. Optimising the casing walls results in a 22% increase in maximum fluid flow reaching (Formula presented.) at (Formula presented.). It is demonstrated that the performance of bearingless CFFs can be enhanced by modifying the geometry of the casing walls, without requiring changes to the CFF rotor or bearingless motors.