Ge/SiGe Superlattices for Thermoelectric Devices Grown by Low-Energy Plasma-Enhanced Chemical Vapor Deposition

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Author
Cecchi, S.
Etzelstorfer, T.
Müller, E.
Samarelli, A.
Llin, L. F.
Chrastina, D.
Isella, G.
Stangl, J.
Weaver, J. M. R.
Dobson, P.
Paul, D. J.
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Date
2013-07
Type
  • Journal Article
Publication status
published
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Journal / series
Journal of Electronic Materials
Volume
42(7)
Pages
2030 - 2034
Publisher
Springer
Subject
Silicon germanium; Multiple quantum well; Thermoelectrics
Notes
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Citations
Cited 10 times in Web of Science
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