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dc.contributor.author
Chikkadi, Kiran
dc.contributor.author
Roman, Cosmin I.
dc.contributor.author
Hierold, Christofer
dc.date.accessioned
2017-06-10T19:46:59Z
dc.date.available
2017-06-10T19:46:59Z
dc.date.issued
2013
dc.identifier.isbn
978-1-4673-5654-1
dc.identifier.isbn
978-1-4673-5655-8
dc.identifier.other
10.1109/MEMSYS.2013.6474231
dc.identifier.uri
http://hdl.handle.net/20.500.11850/70082
dc.language.iso
en
dc.publisher
IEEE
dc.title
Process control monitors for single-walled carbon nanotube based sensor fabrication processes
dc.type
Conference Paper
ethz.book.title
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20 - 24 January 2013
ethz.pages.start
275
ethz.pages.end
278
ethz.event
26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2013)
ethz.event.location
Taipei, Taiwan
ethz.event.date
January 20-24, 2013
ethz.notes
.
ethz.identifier.wos
ethz.identifier.scopus
ethz.publication.place
Piscataway, NJ
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich, direkt::00012 - Lehre und Forschung, direkt::00007 - Departemente, direkt::02130 - Departement Maschinenbau und Verfahrenstechnik / Department of Mechanical and Process Engineering::03609 - Hierold, Christofer
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich, direkt::00012 - Lehre und Forschung, direkt::00007 - Departemente, direkt::02130 - Departement Maschinenbau und Verfahrenstechnik / Department of Mechanical and Process Engineering::03609 - Hierold, Christofer
ethz.date.deposited
2017-06-10T19:48:25Z
ethz.source
ECIT
ethz.identifier.importid
imp593650d9bf9b324145
ethz.ecitpid
pub:110966
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-14T12:53:26Z
ethz.rosetta.lastUpdated
2017-07-14T12:53:26Z
ethz.rosetta.versionExported
true
ethz.COinS
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