High-density large-scale field emitter arrays for X-ray free electron laser cathodes - Research Collection

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Author

Helfenstein, P.

Date

2013-11

Type

Journal Article

Citations

Cited 11 times in Web of Science

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1016/j.mee.2013.02.039

Journal / series

Microelectronic Engineering

Volume

111

Pages / Article No.

114 - 117

Publisher

Elsevier

Subject

Field emitter array; Electron beam lithography

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Citations

Cited 11 times in Web of Science

ETH Bibliography

yes

Altmetrics