High-density large-scale field emitter arrays for X-ray free electron laser cathodes - Research Collection

Metadata only

Author

Guzenko, V. A.

Mustonen, A.

Helfenstein, P.

Kirk, E.

Tsujino, S.

Date

2013-11

Type

Journal Article

Citations

Cited 5 times in Web of Science

ETH Bibliography

yes

Altmetrics

Publication status

published

External links

https://doi.org/10.1016/j.mee.2013.02.039

Journal / series

Microelectronic Engineering

Volume

111

Pages / Article No.

114 - 117

Publisher

Elsevier

Subject

Field emitter array; Electron beam lithography

Notes

.

More

Show all metadata

Citations

Cited 5 times in Web of Science

ETH Bibliography

yes

Altmetrics