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dc.contributor.author
Guzenko, V. A.
dc.contributor.author
Mustonen, A.
dc.contributor.author
Helfenstein, P.
dc.contributor.author
Kirk, E.
dc.contributor.author
Tsujino, S.
dc.date.accessioned
2017-06-10T20:12:48Z
dc.date.available
2017-06-10T20:12:48Z
dc.date.issued
2013-11
dc.identifier.issn
0167-9317
dc.identifier.issn
1873-5568
dc.identifier.other
10.1016/j.mee.2013.02.039
dc.identifier.uri
http://hdl.handle.net/20.500.11850/70635
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Field emitter array
dc.subject
Electron beam lithography
dc.title
High-density large-scale field emitter arrays for X-ray free electron laser cathodes
dc.type
Journal Article
ethz.journal.title
Microelectronic Engineering
ethz.journal.volume
111
ethz.journal.abbreviated
Microelectron. eng.
ethz.pages.start
114
ethz.pages.end
117
ethz.identifier.wos
ethz.identifier.nebis
000022878
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.date.deposited
2017-06-10T20:12:59Z
ethz.source
ECIT
ethz.identifier.importid
imp593650e4ea2d822298
ethz.ecitpid
pub:111916
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T20:38:36Z
ethz.rosetta.lastUpdated
2018-08-02T12:17:07Z
ethz.rosetta.versionExported
true
ethz.COinS
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