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dc.contributor.author
Jungen, Alain
dc.contributor.author
Stampfer, Christoph
dc.contributor.author
Hoetzel, Jochen
dc.contributor.author
Bright, Victor M.
dc.contributor.author
Hierold, Christofer
dc.date.accessioned
2017-06-08T15:13:53Z
dc.date.available
2017-06-08T15:13:53Z
dc.date.issued
2006-08
dc.identifier.issn
0924-4247
dc.identifier.issn
1873-3069
dc.identifier.other
10.1016/j.sna.2005.12.019
dc.identifier.uri
http://hdl.handle.net/20.500.11850/717
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Carbon nanotubes
dc.subject
Process integration
dc.subject
Nanotube growth
dc.subject
Nanotechnology
dc.subject
NEMS
dc.subject
MEMS
dc.title
Process integration of carbon nanotubes into microelectromechanical systems
dc.type
Conference Paper
ethz.journal.title
Sensors and Actuators A: Physical
ethz.journal.volume
130-131
ethz.journal.abbreviated
Sens. actuators, A, Phys.
ethz.pages.start
588
ethz.pages.end
594
ethz.event
13th International Conference on Solid-State Sensors, Actuators and Microsystems 2005 (TRANSDUCERS '05)
ethz.event.location
Seoul, South Korea
ethz.event.date
June 5-9, 2005
ethz.notes
Received 16 June 2005, Revised 17 November 2005, Accepted 5 December 2005, Available online 20 January 2006.
ethz.identifier.wos
ethz.identifier.nebis
000540889
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
ethz.date.deposited
2017-06-08T15:14:12Z
ethz.source
ECIT
ethz.identifier.importid
imp59364b308669677737
ethz.ecitpid
pub:10477
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-20T13:38:05Z
ethz.rosetta.lastUpdated
2022-03-28T07:11:30Z
ethz.rosetta.versionExported
true
ethz.COinS
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