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dc.contributor.author
Trabadelo, Vera
dc.contributor.author
Schift, Helmut
dc.contributor.author
Merino, Santos
dc.contributor.author
Bellini, Sandro
dc.contributor.author
Gobrecht, Jens
dc.date.accessioned
2017-06-10T22:52:55Z
dc.date.available
2017-06-10T22:52:55Z
dc.date.issued
2008-06
dc.identifier.issn
0167-9317
dc.identifier.issn
1873-5568
dc.identifier.other
10.1016/j.mee.2008.01.086
dc.identifier.uri
http://hdl.handle.net/20.500.11850/73388
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Nanoimprint lithography
dc.subject
Force history
dc.subject
Demolding force
dc.title
Measurement of demolding forces in full wafer thermal nanoimprint
dc.type
Conference Paper
ethz.journal.title
Microelectronic Engineering
ethz.journal.volume
85
ethz.journal.issue
5-6
ethz.journal.abbreviated
Microelectron. eng.
ethz.pages.start
907
ethz.pages.end
909
ethz.event
33rd International Conference on Micro- and Nano-Engineering
ethz.event.location
Copenhagen, Denmark
ethz.event.date
September 23-26, 2007
ethz.notes
.
ethz.identifier.wos
ethz.identifier.nebis
000022878
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.date.deposited
2017-06-10T22:56:16Z
ethz.source
ECIT
ethz.identifier.importid
imp5936511a86ff429288
ethz.ecitpid
pub:116173
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T16:43:54Z
ethz.rosetta.lastUpdated
2018-08-02T12:42:18Z
ethz.rosetta.versionExported
true
ethz.COinS
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