Large Stroke Staggered Vertical Comb-Drive Actuator for the Application of a Millimeter-Wave Tunable Phase Shifter - Research Collection

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Author

Hesselbarth, J.

Date

2013-08

Type

Journal Article

Citations

Cited null times in Web of Science

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1109/JMEMS.2013.2252146

Journal / series

Journal of microelectromechanical systems

Volume

22(4)

Pages / Article No.

962 - 975

Publisher

IEEE

Subject

Comb drive actuators; Electrostatic actuation; Phase shifter; SU-8; Waveguide

Organisational unit

03472 - Professur für Feldtheorie (ehemalig)
03609 - Hierold, Christofer / Hierold, Christofer

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Citations

Cited null times in Web of Science

ETH Bibliography

yes

Altmetrics