Large Stroke Staggered Vertical Comb-Drive Actuator for the Application of a Millimeter-Wave Tunable Phase Shifter
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Date
2013-08Type
- Journal Article
Publication status
publishedExternal links
Journal / series
Journal of Microelectromechanical SystemsVolume
Pages / Article No.
Publisher
IEEESubject
Comb drive actuators; Electrostatic actuation; Phase shifter; SU-8; WaveguideOrganisational unit
03472 - Professur für Feldtheorie (ehemalig)
03609 - Hierold, Christofer / Hierold, Christofer
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