Large Stroke Staggered Vertical Comb-Drive Actuator for the Application of a Millimeter-Wave Tunable Phase Shifter

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Author
Li, Y. J.
Psychogiou, D.
Kuhne, S.
Hesselbarth, J.
Hafner, C.
Hierold, C.
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Date
2013-08
Type
    Journal Article
Publication status
published
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Journal / series
Journal of microelectromechanical systems
Volume
22(4)
Pages / Article No.
962 - 975
Publisher
IEEE
Subject
Comb drive actuators; Electrostatic actuation; Phase shifter; SU-8; Waveguide
Organisational unit
03472 - Professur für Feldtheorie (ehemalig)  
03609 - Hierold, Christofer / Hierold, Christofer  
Notes
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Citations
Cited 9 times in Web of Science
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yes
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