Large Stroke Staggered Vertical Comb-Drive Actuator for the Application of a Millimeter-Wave Tunable Phase Shifter - Research Collection

Metadata only

Author

Hesselbarth, J.

Date

2013-08

Type

Journal Article

Citations

Cited 14 times in Web of Science

ETH Bibliography

yes

Altmetrics

Publication status

published

External links

https://doi.org/10.1109/JMEMS.2013.2252146

Journal / series

Journal of Microelectromechanical Systems

Volume

22(4)

Pages / Article No.

962 - 975

Publisher

IEEE

Subject

Comb drive actuators; Electrostatic actuation; Phase shifter; SU-8; Waveguide

Organisational unit

03472 - Professur für Feldtheorie (ehemalig)
03609 - Hierold, Christofer / Hierold, Christofer

More

Show all metadata

Citations

Cited 14 times in Web of Science

ETH Bibliography

yes

Altmetrics