Large Stroke Staggered Vertical Comb-Drive Actuator for the Application of a Millimeter-Wave Tunable Phase Shifter

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Author
Li, Y. J.
Psychogiou, D.
Kuhne, S.
Hesselbarth, J.
Hafner, C.
Hierold, C.
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Date
2013-08
Type
  • Journal Article
Publication status
published
External links
Full text via SFX
Journal / series
Journal of microelectromechanical systems
Volume
22(4)
Pages
962 - 975
Publisher
IEEE
Subject
Comb drive actuators; Electrostatic actuation; Phase shifter; SU-8; Waveguide
Organisational unit
03472 - Professur für Feldtheorie (ehemalig)
03609 - Hierold, Christofer
Notes
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