High-energy-resolution grazing emission X-ray fluorescence applied to the characterization of thin Al films on Si
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Date
2013Type
- Journal Article
ETH Bibliography
yes
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Publication status
publishedJournal / series
Spectrochimica Acta. Part B, Atomic SpectroscopyVolume
Pages / Article No.
Publisher
ElsevierSubject
Grazing emission; X-ray fluorescence (GEXRF); Thin film characterization; Synchrotron radiation; High-resolution X-ray spectroscopyMore
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ETH Bibliography
yes
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