Unstructured tetrahedric meshes for the description of complex three-dimensional sample geometries in Monte Carlo simulation of scanning electron microscopy images for metrology applications
Illarionov, Alexey Yu
- Conference Paper
Journal / seriesMicroelectronics Reliability
Pages / Article No.
Organisational unit03380 - Huang, Qiuting / Huang, Qiuting
NotesReceived 21 May 2013, Received in revised form 26 June 2013, Accepted 21 July 2013.
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