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dc.contributor.author
Ilgünsatiroglu, Emre
dc.contributor.author
Illarionov, Alexey Yu
dc.contributor.author
Ciappa, Mauro
dc.date.accessioned
2017-06-10T23:55:17Z
dc.date.available
2017-06-10T23:55:17Z
dc.date.issued
2013
dc.identifier.issn
0026-2714
dc.identifier.issn
1872-941X
dc.identifier.other
10.1016/j.microrel.2013.07.131
dc.identifier.uri
http://hdl.handle.net/20.500.11850/74460
dc.language.iso
en
dc.publisher
Elsevier
dc.title
Unstructured tetrahedric meshes for the description of complex three-dimensional sample geometries in Monte Carlo simulation of scanning electron microscopy images for metrology applications
dc.type
Conference Paper
ethz.journal.title
Microelectronics Reliability
ethz.journal.volume
53
ethz.journal.issue
9-11
ethz.journal.abbreviated
Microelectron. reliab.
ethz.pages.start
1381
ethz.pages.end
1386
ethz.event
24th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis (ESREF 2013)
ethz.event.location
Arcachon, France
ethz.event.date
September 30 - October 4, 2013
ethz.notes
Received 21 May 2013, Received in revised form 26 June 2013, Accepted 21 July 2013.
ethz.identifier.wos
ethz.identifier.scopus
ethz.identifier.nebis
001933457
ethz.publication.place
Kidlington, Oxford
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::02636 - Institut für Integrierte Systeme / Integrated Systems Laboratory::03380 - Huang, Qiuting / Huang, Qiuting
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::02636 - Institut für Integrierte Systeme / Integrated Systems Laboratory::03380 - Huang, Qiuting / Huang, Qiuting
ethz.date.deposited
2017-06-10T23:58:27Z
ethz.source
ECIT
ethz.identifier.importid
imp5936513049ce119058
ethz.ecitpid
pub:117717
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T14:39:53Z
ethz.rosetta.lastUpdated
2018-11-02T11:19:12Z
ethz.rosetta.exportRequired
true
ethz.rosetta.versionExported
true
ethz.COinS
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