Thermal conductivity of hard oxynitride coatings

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Author
Böttger, P.H.M.
Lewin, E.
Patscheider, J.
Shklover, V.
Cahill, D.G.
Ghisleni, R.
Sobiech, M.
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Date
2013-12-31
Type
    Journal Article
Publication status
published
External links
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Journal / series
Thin Solid Films
Volume
549
Pages / Article No.
232 - 238
Publisher
Elsevier
Subject
Oxynitride; Coating; Thermal conductivity; Oxide nitride
Organisational unit
03401 - Steurer, Walter  
Notes
Available online 11 October 2013.
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Citations
Cited 15 times in Scopus
ETH Bibliography
yes
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