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dc.contributor.author
Chikkadi, Kiran
dc.contributor.author
Haluska, Miroslav
dc.contributor.author
Hierold, Christofer
dc.contributor.author
Roman, Cosmin
dc.date.accessioned
2017-06-11T00:40:45Z
dc.date.available
2017-06-11T00:40:45Z
dc.date.issued
2013
dc.identifier.isbn
978-1-4673-4847-8
dc.identifier.isbn
978-1-4673-4845-4
dc.identifier.isbn
978-1-4673-4848-5
dc.identifier.other
10.1109/ICMTS.2013.6528167
dc.identifier.uri
http://hdl.handle.net/20.500.11850/75346
dc.language.iso
en
dc.publisher
IEEE
dc.subject
Process monitoring
dc.subject
Single-walled carbon nanotube
dc.subject
Transistor
dc.subject
Monte carlo
dc.subject
Length and density distribution
dc.title
Process control monitors for individual single-walled carbon nanotube transistor fabrication processes
dc.type
Conference Paper
ethz.book.title
2013 IEEE International Conference on Microelectronic Test Structures (ICMTS 2013) : Osaka, Japan, 25 - 28 March 2013
ethz.pages.start
173
ethz.pages.end
177
ethz.event
2013 IEEE International Conference on Microelectronic Test Structures (ICMTS 2013)
ethz.event.location
Osaka, Japan
ethz.event.date
March 25-28, 2013
ethz.notes
.
ethz.publication.place
Piscataway, NJ
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
ethz.date.deposited
2017-06-11T00:44:11Z
ethz.source
ECIT
ethz.identifier.importid
imp59365140cd28f62653
ethz.ecitpid
pub:118970
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-17T09:02:28Z
ethz.rosetta.lastUpdated
2018-11-02T11:36:45Z
ethz.rosetta.versionExported
true
ethz.COinS
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