Efficient 3D Monte Carlo Simulation of Orientation and Stress Effects in FinFETs
Metadata only
Date
2013Type
- Conference Paper
Publication status
publishedExternal links
Book title
International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) 2013, 3-5 September 2013, Glasgow, ScotlandPages / Article No.
Publisher
IEEEEvent
Organisational unit
03228 - Fichtner, Wolfgang
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