Thermal Probe Nanolithography
In-situ inspection, high-speed, high-resolution, 3D
Metadata only
Date
2013Type
- Conference Paper
Publication status
publishedExternal links
Editor
Book title
29th European Mask and Lithography ConferenceJournal / series
Proceedings of SPIEVolume
Publisher
SPIEEvent
Subject
Thermal Scanning Probe Lithography; Electron Beam Lithography; Mask Less Lithography; Direct Write; Polyphthalaldehyde; 3D Patterning; Pattern TransferMore
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