Self-aligned Ge and SiGe three-dimensional epitaxy on dense Si pillar arrays

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Author
Bergamaschini, R.
Isa, F.
Falub, C.V.
Niedermann, P.
Müller, E.
Isella, G.
Känel, H. von
Miglio, L.
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Date
2013
Type
    Journal Article
Publication status
published
External links
Journal / series
Surface Science Reports
Volume
68(3–4)
Pages / Article No.
390 - 417
Publisher
North-Holland
Organisational unit
03569 - Batlogg, Bertram (emeritus)  
Notes
Available online 2 November 2013.
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yes
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