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dc.contributor.author
Rollinger, B.
dc.contributor.author
Giovannini, A. Z.
dc.contributor.author
Gambino, N.
dc.contributor.author
Bozinova, L.
dc.contributor.author
Hertig, K.
dc.contributor.author
Abhari, Reza S.
dc.date.accessioned
2017-06-11T03:00:43Z
dc.date.available
2017-06-11T03:00:43Z
dc.date.issued
2013
dc.identifier.uri
http://hdl.handle.net/20.500.11850/78090
dc.language.iso
en
dc.title
LPP Light Source for High Volume Production and Scalability
dc.type
Other Conference Item
ethz.event
International Symposium on EUV Lithography
ethz.event.location
Toyama, Japan
ethz.event.date
October 6-10, 2013
ethz.notes
Published online.
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02668 - Inst. f. Energie- und Verfahrenstechnik / Inst. Energy and Process Engineering::03548 - Abhari, Reza S. / Abhari, Reza S.
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02627 - Institut für Energietechnik (ehemalig) / Institute of Energy Technology (former)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02668 - Inst. f. Energie- und Verfahrenstechnik / Inst. Energy and Process Engineering::03548 - Abhari, Reza S. / Abhari, Reza S.
ethz.date.deposited
2017-06-11T03:03:25Z
ethz.source
ECIT
ethz.identifier.importid
imp5936517599e5e36540
ethz.ecitpid
pub:123014
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-19T01:42:33Z
ethz.rosetta.lastUpdated
2021-02-14T11:11:18Z
ethz.rosetta.versionExported
true
ethz.COinS
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