Defect Analysis with TCAD-Based DLTS Simulation

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Author
Scheinemann, A.
Schenk, A.
Date
2013
Type
  • Other Conference Item
Publication status
published
External links
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Editor
Mori, Nobuya
Selberherr, Siegfried
Book title
16th International Workshop on Computational Electronics : Book of Abstracts : June 4-7, 2013 : Nara, Japan
Pages / Article No.
130 - 131
Publisher
Society for Micro- and Nanoelectronics
Event
16th International Workshop on Computational Electronics (IWCE 2013), Nara, Japan, June 4-7, 2013
Organisational unit
03925 - Luisier, Mathieu / Luisier, Mathieu  
Notes
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