Two-dimensional Dopant Imaging of Silicon Carbide Devices by Secondary Electron Potential Contrast

Metadata only

Author

Date

2007

Type

Conference Paper

ETH Bibliography

yes

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Publication status

published

External links

Journal / series

Microelectronic Engineering

Volume

84(3)

Pages / Article No.

413 - 418

Publisher

Elsevier

Event

European Materials Research Society 2006, Nice, France, May 29 - June 02, 2006

Organisational unit

03228 - Fichtner, Wolfgang

Notes

Available online 27 October 2006.

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ETH Bibliography

yes

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Research Collection