Two-dimensional Dopant Imaging of Silicon Carbide Devices by Secondary Electron Potential Contrast
Metadata only
Date
2007Type
- Conference Paper
ETH Bibliography
yes
Altmetrics
Publication status
publishedExternal links
Journal / series
Microelectronic EngineeringVolume
Pages / Article No.
Publisher
ElsevierEvent
Organisational unit
03228 - Fichtner, Wolfgang
Notes
Available online 27 October 2006.More
Show all metadata
ETH Bibliography
yes
Altmetrics