Two-dimensional Dopant Imaging of Silicon Carbide Devices by Secondary Electron Potential Contrast

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Author
Buzzo, M.
Ciappa, Mauro
Millan, J.
Godignon, P.
Fichtner, Wolfgang
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Date
2007
Type
  • Conference Paper
Publication status
published
External links
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Journal / series
Microelectronic Engineering
Volume
84(3)
Pages
413 - 418
Publisher
Elsevier
Event
European Materials Research Society 2006, Nice, France, May 29 - June 02, 2006
Organisational unit
03228 - Fichtner, Wolfgang
Notes
Available online 27 October 2006.
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Citations
Cited 9 times in Web of Science
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