Nanoscale imaging and metrology of devices and innovative materials

Metadata only

Author

Date

2007

Type

Other Conference Item

ETH Bibliography

yes

Altmetrics

Publication status

published

External links

Journal / series

Microelectronic Engineering

Volume

84(3)

Pages / Article No.

375 - 375

Publisher

Elsevier

Event

E-MRS/IUMRS ICEM 2006 Spring Meeting 2006, May 29 -June 2, 2006

Organisational unit

03228 - Fichtner, Wolfgang

Notes

Available online 15 February 2007.

More

ETH Bibliography

yes

Altmetrics

Research Collection