Nanoscale imaging and metrology of devices and innovative materials

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Author
Spinella, Corrado
Raineri, Vito
Vandervorst, Wilfried
Ciappa, Mauro
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Date
2007
Type
  • Other Conference Item
Publication status
published
External links
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Journal / series
Microelectronic Engineering
Volume
84(3)
Pages
375 - 375
Publisher
Elsevier
Event
E-MRS/IUMRS ICEM 2006 Spring Meeting 2006, May 29 -June 2, 2006
Organisational unit
03228 - Fichtner, Wolfgang
Notes
Available online 15 February 2007.
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