Nanoscale imaging and metrology of devices and innovative materials - Research Collection

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Author

Spinella, Corrado

Raineri, Vito

Vandervorst, Wilfried

Ciappa, Mauro

Date

2007

Type

Other Conference Item

Citations

Cited 0 times in Web of Science

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1016/j.mee.2007.01.205

Journal / series

Microelectronic Engineering

Volume

84(3)

Pages / Article No.

375 - 375

Publisher

Elsevier

Event

E-MRS/IUMRS ICEM 2006 Spring Meeting 2006, May 29 -June 2, 2006

Organisational unit

03228 - Fichtner, Wolfgang

Notes

Available online 15 February 2007.

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Citations

Cited 0 times in Web of Science

ETH Bibliography

yes

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