Nanoscale imaging and metrology of devices and innovative materials
dc.contributor.author
Spinella, Corrado
dc.contributor.author
Raineri, Vito
dc.contributor.author
Vandervorst, Wilfried
dc.contributor.author
Ciappa, Mauro
dc.date.accessioned
2017-06-08T17:59:20Z
dc.date.available
2017-06-08T17:59:20Z
dc.date.issued
2007
dc.identifier.issn
0167-9317
dc.identifier.issn
1873-5568
dc.identifier.other
10.1016/j.mee.2007.01.205
dc.identifier.uri
http://hdl.handle.net/20.500.11850/7968
dc.language.iso
en
dc.publisher
Elsevier
dc.title
Nanoscale imaging and metrology of devices and innovative materials
dc.type
Other Conference Item
ethz.journal.title
Microelectronic Engineering
ethz.journal.volume
84
ethz.journal.issue
3
ethz.journal.abbreviated
Microelectron. eng.
ethz.pages.start
375
ethz.pages.end
375
ethz.event
E-MRS/IUMRS ICEM 2006 Spring Meeting 2006
ethz.event.date
May 29 -June 2, 2006
ethz.notes
Available online 15 February 2007.
ethz.identifier.nebis
000022878
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
03228 - Fichtner, Wolfgang
ethz.leitzahl.certified
03228 - Fichtner, Wolfgang
ethz.date.deposited
2017-06-08T17:59:33Z
ethz.source
ECIT
ethz.identifier.importid
imp59364bbdcc97854694
ethz.ecitpid
pub:18611
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-13T08:35:45Z
ethz.rosetta.lastUpdated
2018-08-02T04:09:45Z
ethz.rosetta.versionExported
true
ethz.COinS
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Other Conference Item [19948]