Thin films of SnO2:F by reactive magnetron sputtering with rapid thermal post-annealing

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Author
Jäger, T.
Bissig, B.
Döbeli, M.
Tiwari, A.N.
Romanyuk, Y.E.
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Date
2014
Type
  • Conference Paper
Publication status
published
External links
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Journal / series
Thin Solid Films
Volume
553
Pages
21 - 25
Publisher
Elsevier
Event
European Materials Research Society (E-MRS) Spring Meeting 2013, Strasbourg, France, May 27-31, 2013
Subject
Transparent conducting oxide; Fluorine doped tin oxide; Magnetron sputtering; Rapid thermal annealing; Low emissive coatings
Notes
Available online 28 December 2013.
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Citations
Cited 14 times in Web of Science
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