Pinhole diffraction holography for fabrication of high-resolution Fresnel Zone Plates

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Author

Date

2014-01

Type

Journal Article

ETH Bibliography

yes

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Publication status

published

External links

Journal / series

Optics Express

Volume

22(2)

Pages / Article No.

1402 - 1412

Publisher

OSA Publishing

Subject

Extreme-ultraviolet holography; Spatial-resolution; Lithography; Laser

Notes

Received 25 November 2013, Revised 6 January 2014, Accepted 6 January 2014, Published 14 January 2014.

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ETH Bibliography

yes

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