Pinhole diffraction holography for fabrication of high-resolution Fresnel Zone Plates
- Journal Article
Journal / seriesOptics Express
Pages / Article No.
PublisherOptical Society of America
SubjectExtreme-ultraviolet holography; Spatial-resolution; Lithography; Laser
NotesReceived 25 November 2013, Revised 6 January 2014, Accepted 6 January 2014, Published 14 January 2014.
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