Pinhole diffraction holography for fabrication of high-resolution Fresnel Zone Plates
Sarkar, Sankha S.
Solak, Harun H.
der Veen, J.Friso van
- Journal Article
Journal / seriesOptics express
PublisherOptical Society of America
SubjectExtreme-ultraviolet holography; Spatial-resolution; Lithography; Laser
NotesReceived 25 November 2013, Revised 6 January 2014, Accepted 6 January 2014, Published 14 January 2014.
MoreShow all metadata