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dc.contributor.author
Sarkar, Sankha S.
dc.contributor.author
Solak, Harun H.
dc.contributor.author
David, Christian
dc.contributor.author
der Veen, J.Friso van
dc.date.accessioned
2017-06-11T05:21:13Z
dc.date.available
2017-06-11T05:21:13Z
dc.date.issued
2014-01
dc.identifier.issn
1094-4087
dc.identifier.other
10.1364/OE.22.001402
dc.identifier.uri
http://hdl.handle.net/20.500.11850/80912
dc.language.iso
en
dc.publisher
Optical Society of America
dc.subject
Extreme-ultraviolet holography
dc.subject
Spatial-resolution
dc.subject
Lithography
dc.subject
Laser
dc.title
Pinhole diffraction holography for fabrication of high-resolution Fresnel Zone Plates
dc.type
Journal Article
ethz.journal.title
Optics Express
ethz.journal.volume
22
ethz.journal.issue
2
ethz.journal.abbreviated
Opt. express
ethz.pages.start
1402
ethz.pages.end
1412
ethz.notes
Received 25 November 2013, Revised 6 January 2014, Accepted 6 January 2014, Published 14 January 2014.
ethz.identifier.wos
ethz.identifier.nebis
001934332
ethz.publication.place
S.l.
ethz.publication.status
published
ethz.date.deposited
2017-06-11T05:21:28Z
ethz.source
ECIT
ethz.identifier.importid
imp593651a849ba688281
ethz.ecitpid
pub:127175
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-15T02:58:26Z
ethz.rosetta.lastUpdated
2020-02-14T13:19:20Z
ethz.rosetta.versionExported
true
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