Surface layer evolution caused by the bombardment with ionized metal vapor

Döbeli, M.; Dommann, A.; Mäder, X.; Neels, A.; Passerone, D.; Rudigier, H.; Scopece, D.; Widrig, B.; Ramm, J.

doi:10.1016/j.nimb.2014.02.091

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Author

Date

2014-03-17

Type

Conference Paper

Citations

Cited 2 times in Web of Science

Cited 2 times in Scopus

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1016/j.nimb.2014.02.091

Journal / series

Nuclear Instruments & Methods in Physics Research. Section B

Volume

332

Pages / Article No.

337 - 340

Publisher

North-Holland

Event

21st International Conference on Ion Beam Analysis (IBA – 2013), Seattle, WA, USA

Subject

Cathodic arc evaporation; Coating; Metal ion etching; Rutherford backscattering spectrometry; Sputtering; TRIDYN

Notes

Available online 15 March 2014. June 23-28, 2013.

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Citations

Cited 2 times in Web of Science

Cited 2 times in Scopus

ETH Bibliography

yes

Altmetrics

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Surface layer evolution caused by the bombardment with ionized metal vapor

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