Surface layer evolution caused by the bombardment with ionized metal vapor
Metadata only
Date
2014-03-17Type
- Conference Paper
Publication status
publishedJournal / series
Nuclear Instruments & Methods in Physics Research. Section BVolume
Pages
Publisher
North-HollandEvent
Subject
Cathodic arc evaporation; Coating; Metal ion etching; Rutherford backscattering spectrometry; Sputtering; TRIDYNNotes
Available online 15 March 2014. June 23-28, 2013.More
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