Publication status
publishedExternal links
Journal / series
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and AtomsVolume
Pages / Article No.
Publisher
North-HollandEvent
Subject
Cathodic arc evaporation; Coating; Metal ion etching; Rutherford backscattering spectrometry; Sputtering; TRIDYNNotes
Available online 15 March 2014. June 23-28, 2013.More
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