Surface layer evolution caused by the bombardment with ionized metal vapor

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Author
Döbeli, M.
Dommann, A.
Mäder, X.
Neels, A.
Passerone, D.
Rudigier, H.
Scopece, D.
Widrig, B.
Ramm, J.
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Date
2014-03-17
Type
  • Conference Paper
Publication status
published
External links
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Journal / series
Nuclear Instruments & Methods in Physics Research. Section B
Volume
332
Pages / Article No.
337 - 340
Publisher
North-Holland
Event
21st International Conference on Ion Beam Analysis (IBA – 2013), Seattle, WA, USA
Subject
Cathodic arc evaporation; Coating; Metal ion etching; Rutherford backscattering spectrometry; Sputtering; TRIDYN
Notes
Available online 15 March 2014. June 23-28, 2013.
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Citations
Cited 2 times in Web of Science
ETH Bibliography
yes
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