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dc.contributor.author
Döbeli, M.
dc.contributor.author
Dommann, A.
dc.contributor.author
Mäder, X.
dc.contributor.author
Neels, A.
dc.contributor.author
Passerone, D.
dc.contributor.author
Rudigier, H.
dc.contributor.author
Scopece, D.
dc.contributor.author
Widrig, B.
dc.contributor.author
Ramm, J.
dc.date.accessioned
2017-06-11T05:38:18Z
dc.date.available
2017-06-11T05:38:18Z
dc.date.issued
2014-03-17
dc.identifier.issn
0168-583X
dc.identifier.issn
1872-9584
dc.identifier.other
10.1016/j.nimb.2014.02.091
dc.identifier.uri
http://hdl.handle.net/20.500.11850/81167
dc.language.iso
en
dc.publisher
North-Holland
dc.subject
Cathodic arc evaporation
dc.subject
Coating
dc.subject
Metal ion etching
dc.subject
Rutherford backscattering spectrometry
dc.subject
Sputtering
dc.subject
TRIDYN
dc.title
Surface layer evolution caused by the bombardment with ionized metal vapor
dc.type
Conference Paper
ethz.journal.title
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
ethz.journal.volume
332
ethz.journal.abbreviated
Nucl. instrum. methods phys. res., B Beam interact. mater. atoms
ethz.pages.start
337
ethz.pages.end
340
ethz.event
21st International Conference on Ion Beam Analysis (IBA – 2013)
ethz.event.location
Seattle, WA, USA
ethz.notes
Available online 15 March 2014. June 23-28, 2013.
ethz.identifier.wos
ethz.identifier.scopus
ethz.identifier.nebis
007892164
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.date.deposited
2017-06-11T05:40:39Z
ethz.source
ECIT
ethz.identifier.importid
imp593651ad6c61a73477
ethz.ecitpid
pub:127683
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-14T19:06:30Z
ethz.rosetta.lastUpdated
2022-03-28T12:37:20Z
ethz.rosetta.versionExported
true
ethz.COinS
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