Efficient transfer of carbon nanotubes for device fabrication using an LOR resist sacrificial layer

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Author
Doring, V.
Süss, T.
Hierold, C.
Date
2014-02
Type
  • Journal Article
Publication status
published
External links
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Journal / series
Sensors and Actuators. A, Physical
Volume
208
Pages
152 - 158
Publisher
Elsevier
Subject
Carbon nanotube; Carbon nanotube devices; Transfer; Sacrificial layer
Organisational unit
03609 - Hierold, Christofer
Notes
Received 13 September 2013, Received in revised form 23 December 2013, Accepted 24 December 2013.
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Cited 2 times in Web of Science
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