Efficient transfer of carbon nanotubes for device fabrication using an LOR resist sacrificial layer
Metadata only
Date
2014-02Type
- Journal Article
Publication status
publishedExternal links
Journal / series
Sensors and Actuators. A, PhysicalVolume
Pages / Article No.
Publisher
ElsevierSubject
Carbon nanotube; Carbon nanotube devices; Transfer; Sacrificial layerOrganisational unit
03609 - Hierold, Christofer / Hierold, Christofer
Notes
Received 13 September 2013, Received in revised form 23 December 2013, Accepted 24 December 2013.More
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