Novel High Speed 3 DOF Linear Drive Operating with Submicron Precision

Metadata only

Author

Date

1998

Type

Conference Paper

ETH Bibliography

yes

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Publication status

published

External links

Book title

Microrobotics and Microsystem Fabrication ; 78

Journal / series

Proceedings of SPIE

Volume

3202

Publisher

SPIE

Event

Conference on Microrobotics and Microsystem Fabrication, Pittsburgh, PA, USA, October 16-17, 1997

Organisational unit

03737 - Siegwart, Roland Y. / Siegwart, Roland Y.

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ETH Bibliography

yes

Altmetrics

Research Collection