Reconstruction of Scanning Electron Microscopy Images by Monte Carlo Simulation to Improve the Accuracy of Critical Dimension Measurement in Advanced CMOS Devices

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Author
Ciappa, Mauro
Date
2008
Type
    Conference Paper
Publication status
published
Publisher
International Workshop on Remote Scanning Electron Microscopy 2008
Event
International Workshop on Remote Scanning Electron Microscopy 2008, October 20-22, 2008
Organisational unit
03228 - Fichtner, Wolfgang  
Notes
Conference lecture.
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