Photomask-based integration process of low-defect suspended carbon nanotubes into SOI MEMS
- Journal Article
Journal / seriesNanotechnology
Pages / Article No.
PublisherInstitute of Physics
SubjectIntegration; Suspended; Nanotube; MEMS; Photolithography
Organisational unit03609 - Hierold, Christofer
NotesReceived 18 September 2013, accepted for publication 1 April 2014, Published 2 May 2014.
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