Photomask-based integration process of low-defect suspended carbon nanotubes into SOI MEMS
Metadata only
Date
2014-05Type
- Journal Article
Publication status
publishedExternal links
Journal / series
NanotechnologyVolume
Pages / Article No.
Publisher
Institute of PhysicsSubject
Integration; Suspended; Nanotube; MEMS; PhotolithographyOrganisational unit
03609 - Hierold, Christofer / Hierold, Christofer
Notes
Received 18 September 2013, accepted for publication 1 April 2014, Published 2 May 2014.More
Show all metadata