Photomask-based integration process of low-defect suspended carbon nanotubes into SOI MEMS - Research Collection

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Author

Lee, Shih-Wei

Muoth, Matthias

Hierold, Christofer

Date

2014-05

Type

Journal Article

Citations

Cited 5 times in Web of Science

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1088/0957-4484/25/21/215301

Journal / series

Nanotechnology

Volume

25(21)

Pages / Article No.

215301

Publisher

Institute of Physics

Subject

Integration; Suspended; Nanotube; MEMS; Photolithography

Organisational unit

03609 - Hierold, Christofer / Hierold, Christofer

Notes

Received 18 September 2013, accepted for publication 1 April 2014, Published 2 May 2014.

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Citations

Cited 5 times in Web of Science

ETH Bibliography

yes

Altmetrics