Focal length stabilization of a tunable lens integrated focus shifting unit

Metadata only

Author

Date

2014

Type

Conference Paper

ETH Bibliography

yes

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Publication status

published

External links

Editor

Book title

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX : 3-6 February 2014, San Francisco, California, United States

Journal / series

Proceedings of SPIE

Volume

8967

Pages / Article No.

89670G

Publisher

SPIE

Event

Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, San Francisco, CA, USA, February 3-6, 2014

Subject

Tunable lens; Focus shifting; Beam deflection; Control system; Accuracy; Microprocessing; 3D processing; Focal spot

Organisational unit

03641 - Wegener, Konrad (emeritus) / Wegener, Konrad (emeritus)

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ETH Bibliography

yes

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Research Collection