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dc.contributor.author
Eberle, Gregory
dc.contributor.author
Boesser, Benjamin
dc.contributor.author
Wegener, Konrad
dc.contributor.editor
Nakata, Yoshiki
dc.contributor.editor
Xu, Xianfan
dc.contributor.editor
Roth, Stephan
dc.contributor.editor
Neuenschwander, Beat
dc.date.accessioned
2017-06-11T09:09:34Z
dc.date.available
2017-06-11T09:09:34Z
dc.date.issued
2014
dc.identifier.isbn
978-0-8194-9880-9
dc.identifier.issn
0277-786X
dc.identifier.other
10.1117/12.2035104
dc.identifier.uri
http://hdl.handle.net/20.500.11850/84812
dc.language.iso
en
dc.publisher
SPIE
dc.subject
Tunable lens
dc.subject
Focus shifting
dc.subject
Beam deflection
dc.subject
Control system
dc.subject
Accuracy
dc.subject
Microprocessing
dc.subject
3D processing
dc.subject
Focal spot
dc.title
Focal length stabilization of a tunable lens integrated focus shifting unit
dc.type
Conference Paper
ethz.book.title
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX : 3-6 February 2014, San Francisco, California, United States
ethz.journal.title
Proceedings of SPIE
ethz.journal.volume
8967
ethz.journal.abbreviated
Proc. SPIE Int. Soc. Opt. Eng.
ethz.pages.start
89670G
ethz.size
9 p.
ethz.event
Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX
ethz.event.location
San Francisco, CA, USA
ethz.event.date
February 3-6, 2014
ethz.identifier.wos
ethz.publication.place
Bellingham, WA
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02623 - Inst. f. Werkzeugmaschinen und Fertigung / Inst. Machine Tools and Manufacturing::03641 - Wegener, Konrad (emeritus) / Wegener, Konrad (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02623 - Inst. f. Werkzeugmaschinen und Fertigung / Inst. Machine Tools and Manufacturing::03641 - Wegener, Konrad (emeritus) / Wegener, Konrad (emeritus)
ethz.date.deposited
2017-06-11T09:10:26Z
ethz.source
ECIT
ethz.identifier.importid
imp593651f4065ac47873
ethz.ecitpid
pub:133763
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-19T10:06:13Z
ethz.rosetta.lastUpdated
2024-02-01T21:52:25Z
ethz.rosetta.versionExported
true
ethz.COinS
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