Energy-based thermal reflow simulation for 3D polymer shape prediction using Surface Evolver
- Journal Article
Journal / seriesJournal of Micromechanics and Microengineering
PublisherInstitute of Physics
SubjectVisco-elastic creep; Topography equilibration; Soapfilm; Molecular weight; Grayscale; Electron-beam; Nanoimprint
NotesReceived 8 November 2013, Revised 17 February 2014, Accepted for publication 24 February 2014, Published 3 April 2014.
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