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dc.contributor.author
Nellen, Philipp M.
dc.contributor.author
Strasser, Patric
dc.contributor.author
Callegari, Victor
dc.contributor.author
Wüest, Robert
dc.contributor.author
Erni, Daniel
dc.contributor.author
Robin, Franck
dc.date.accessioned
2017-06-08T18:13:53Z
dc.date.available
2017-06-08T18:13:53Z
dc.date.issued
2007
dc.identifier.issn
0167-9317
dc.identifier.issn
1873-5568
dc.identifier.other
10.1016/j.mee.2007.01.037
dc.identifier.uri
http://hdl.handle.net/20.500.11850/8559
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Focused ion beam modifications
dc.subject
Photonic crystals
dc.subject
Indium phosphide
dc.title
Focused ion beam modifications of indium phosphide photonic crystals
dc.type
Conference Paper
ethz.journal.title
Microelectronic Engineering
ethz.journal.volume
84
ethz.journal.issue
5-8
ethz.journal.abbreviated
Microelectron. eng.
ethz.pages.start
1244
ethz.pages.end
1247
ethz.event
32nd International Conference on Micro- and Nano-Engineering
ethz.event.location
Barcelona, Spain
ethz.event.date
September 17-20, 2006
ethz.notes
Available online 27 January 2007.
ethz.identifier.wos
ethz.identifier.nebis
000022878
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
03386 - Jäckel, Heinz
ethz.leitzahl.certified
03386 - Jäckel, Heinz
ethz.date.deposited
2017-06-08T18:14:00Z
ethz.source
ECIT
ethz.identifier.importid
imp59364bc99593324955
ethz.ecitpid
pub:19321
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-13T08:03:39Z
ethz.rosetta.lastUpdated
2018-08-02T04:15:24Z
ethz.rosetta.versionExported
true
ethz.COinS
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