Influence of carbon enrichment on electrical conductivity and processing of polycarbosilane derived ceramic for MEMS applications

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Author
Dalcanale, Federico
Grossenbacher, Jonas
Blugan, Gurdial
Gullo, Maurizio Rosario
Lauria, Alessandro
Brugger, Jürgen
Tevaearai, Hendrik Tinorua
Graule, Thomas J.
Niederberger, Markus
Kuebler, Jakob
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Date
2014-12
Type
    Journal Article
Publication status
published
External links
Journal / series
Journal of the European Ceramic Society
Volume
34(15)
Pages / Article No.
3559 - 3570
Publisher
Elsevier
Subject
Polymer derived ceramics; Polycarbosilane; MEMS; Divinylbenzene; Electrical conductivity
Organisational unit
03763 - Niederberger, Markus / Niederberger, Markus  
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Notes
Received 16 March 2014, Revised 27 May 2014, Accepted 2 June 2014, Available online 8 July 2014.
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Citations
Cited 55 times in Scopus
ETH Bibliography
yes
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