Influence of carbon enrichment on electrical conductivity and processing of polycarbosilane derived ceramic for MEMS applications
- Journal Article
Journal / seriesJournal of the European Ceramic Society
Pages / Article No.
SubjectPolymer derived ceramics; Polycarbosilane; MEMS; Divinylbenzene; Electrical conductivity
Organisational unit03763 - Niederberger, Markus / Niederberger, Markus
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Is source of: https://doi.org/10.3929/ethz-b-000245156
NotesReceived 16 March 2014, Revised 27 May 2014, Accepted 2 June 2014, Available online 8 July 2014.
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