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dc.contributor.author
Dumont, Th.
dc.contributor.author
Lazare, S.
dc.contributor.author
Lippert, Thomas
dc.contributor.author
Wokaun, Alexander
dc.date.accessioned
2017-06-11T11:17:40Z
dc.date.available
2017-06-11T11:17:40Z
dc.date.issued
2004-09-01
dc.identifier.issn
0947-8396
dc.identifier.issn
1432-0630
dc.identifier.issn
0340-3793
dc.identifier.other
10.1007/s00339-004-2734-7
dc.identifier.uri
http://hdl.handle.net/20.500.11850/87040
dc.language.iso
en
dc.publisher
Springer
dc.title
Changes in the etch rate of photosensitive polymers in function of the pulse number
dc.type
Journal Article
ethz.journal.title
Applied Physics A
ethz.journal.volume
79
ethz.journal.issue
4-6
ethz.pages.start
1271
ethz.pages.end
1274
ethz.notes
.
ethz.identifier.wos
ethz.identifier.nebis
001385963
ethz.publication.place
Berlin
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02020 - Dep. Chemie und Angewandte Biowiss. / Dep. of Chemistry and Applied Biosc.::02513 - Laboratorium für Anorganische Chemie / Laboratory of Inorganic Chemistry
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02020 - Dep. Chemie und Angewandte Biowiss. / Dep. of Chemistry and Applied Biosc.::02516 - Inst. f. Chemie- und Bioingenieurwiss. / Inst. Chemical and Bioengineering::03421 - Wokaun, Alexander (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02020 - Dep. Chemie und Angewandte Biowiss. / Dep. of Chemistry and Applied Biosc.::02516 - Inst. f. Chemie- und Bioingenieurwiss. / Inst. Chemical and Bioengineering::03421 - Wokaun, Alexander (emeritus)
ethz.date.deposited
2017-06-11T11:18:15Z
ethz.source
ECIT
ethz.identifier.importid
imp5936521feea1f25090
ethz.ecitpid
pub:136975
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-20T16:15:25Z
ethz.rosetta.lastUpdated
2018-11-02T15:14:45Z
ethz.rosetta.versionExported
true
ethz.COinS
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